ʻO ka nānā ʻana i ka ʻili ʻili, ke kiʻekiʻe o nā ʻanuʻu a me ka mānoanoa o ka ʻili lahilahi ma nā wafers semiconductor, nā aniani optical precision a me nā ʻāpana i uhi ʻia e hoʻoholo pololei i ka hua hana. ʻO ka nānā ʻana i ka probe pili kuʻuna e ʻōpala maʻalahi i nā laʻana palupalu, ʻoiai ʻaʻole hiki i nā lako ana optical maʻamau ke hāʻawi i ka pololei nano-level. Pehea e hoʻokō ai i ka hoʻāʻo ʻole luku, ka pololei nano ultra-kiʻekiʻe a me ka nānā ʻana i ka hana nui throughput kiʻekiʻe i ka manawa like?
Hoʻokomo ka interferometer kukui keʻokeʻo ʻoihana hou o ka Wavelength OE i nā ʻano ana interferometry pālua. Me ka ʻike ʻana ʻaʻole pili, uhi ia i ke kaʻina hana piha mai ka R&D hale hana a i ka QC hana pūnaewele.
Nā ʻano Interferometry Dual Core no nā Topography ʻili āpau
ʻAʻole e like me nā mea ana hoʻokahi ʻano, hoʻohui kēia ʻōnaehana i nā algorithms VSI (Vertical Scanning Interferometry) a me PSI (Phase-Shifting Interferometry), e hoʻokō ana i ʻelua mau koi ana kumu me hoʻokahi mīkini.
| Mea Hoʻohālikelike | VSI / CSI | PSI |
|---|---|---|
| Nā ʻIli Pili Nui | Nā ʻili paʻakikī, nā ʻanuʻu, nā ʻano ʻāina hoʻomau ʻole a paʻakikī | ʻO nā ʻili laumania loa, hoʻomau a me ke aniani |
| Pae Ana Kiʻekiʻe Kū pololei | Laulā ākea; hiki ke ana i nā ʻauwai hohonu a me nā ʻanuʻu kiʻekiʻe | Ka laulā haiki; ʻaʻole kūpono no nā ʻanuʻu nui i hoʻokaʻawale ʻia |
| Hoʻonā Kū pololei | Pae nanometer; hiki ke hoʻokō ʻia ka sub-nanometer me nā algorithms i hoʻomaikaʻi ʻia | ʻO ka hoʻonā kiʻekiʻe loa; hiki ke hana hou ʻia a hiki i ka pae sub-nanometer a hiki i ka pae sub-angstrom |
| Ka hoʻomanawanui i ka ʻoʻoleʻa o ka ʻili | Kiʻekiʻe | Haʻahaʻa |
| Ka Manaʻo ʻole o ka Pae | ʻAneʻane ʻaʻohe; loaʻa ka hopena waiwai kiʻekiʻe loa | Ma muli o ka hewa ʻōwili pae 2π |
| Ke Ana ʻana i ka Māmā | Pono ka nānā ʻana i ke axial, lohi iki | ʻOi aku ka wikiwiki |
| Ke kū'ē ʻana i ka haʻalulu | Hiki ke hoʻoluliluli ʻia i ka wā e nānā ana | Hoʻololi ʻana o ka pae multi-frame, ʻoi aku ka maʻalahi i ka haʻalulu |
| Nā Hoʻohana Maʻamau | ʻO ka ʻoʻoleʻa, ke kiʻekiʻe o ke ʻanuʻu, nā microstructures, nā ʻili i mīkini ʻia | ʻO ka ʻōniʻoniʻo ʻili laumania loa, ke kiʻi ʻili a me ka hoʻāʻo ʻana i ka palahalaha |
PSI (Phase-Shifting Interferometry): Kūikawā i nā hiʻohiʻona kiʻekiʻe liʻiliʻi nano-scale a me nā kiʻiʻoniʻoni lahilahi loa, e hāʻawi ana i ka hoʻonā microscopic hope loa.
Aniani Mokulele
Aniani Piʻo (Aniani Kūpikipikiʻo)
Laʻana Hoʻohālike Photolithographic
ʻO VSI Vertical Scanning Interferometry: Hoʻonohonoho pono ʻia no nā ʻāpana hana me nā ʻokoʻa kiʻekiʻe nui a me nā ʻanuʻu kiʻekiʻe; loaʻa ka laulā ana piha me ka ʻole o ka scan ʻāpana.
ʻO ka pūʻulu puʻupuʻu liʻiliʻi poepoe ma nā wafers i hoʻopili ʻia holomua
ʻO ka pūʻulu puʻupuʻu liʻiliʻi Elliptical ma nā wafers i hoʻopili ʻia
pūʻulu microlens
Hoʻohālikelike ʻia me kahi kumu kukui keʻokeʻo pōkole 450–700 nm, hiki iā ia ke kāohi pono i ka mālamalama hele hewa mai nā ʻōlinolino he nui a hāʻawi i ka hana anti-interference ikaika. I hoʻolako ʻia me nā uhi multi-layer, hiki i kēia ʻāpana optical me ka reflectivity haʻahaʻa ke hoʻopuka i nā hōʻailona interference paʻa a ʻokoʻa, e hāʻawi ana i nā hopena ana ʻoiaʻiʻo a hilinaʻi hoʻi.
2. Nā Kikoʻī Nano-Grade Alakaʻi ʻOihana, ʻIkepili Lōʻihi Hiki ke Hahai ʻia a Paʻa
-Hoʻohana ka ʻōnaehana i kahi kumu kukui keʻokeʻo LED me ka nalu waena ma 550 nm, i lako me nā ʻōkuhi hana koʻikoʻi kiʻekiʻe e kūlike ana i nā kūlana premium honua.
-Hoʻonā kū pololei: <1 nm, hewa ana hou: <10 nm, pololei nanometer maoli
-Ka laulā ana kū pololei kiʻekiʻe loa: 500 μm, ʻaʻohe koi hoʻololi hou ʻia no nā microstructures kiʻekiʻe-haʻahaʻa.
-Ka wikiwiki o ka scan ʻana: 100 μm/s, hoʻopau ʻia ka scan piha hoʻokahi i loko o 10 kekona, ke kaulike nei i ka pololei a me ka throughput nānā.
-Kūlike me nā kūlana traceable NIST, ʻo ka algorithm auto-calibration i kūkulu ʻia e hōʻoiaʻiʻo ana i ka ʻikepili batch traceable kūlike, e hoʻokō ana i nā kūlana QC koʻikoʻi no nā semiconductor a me nā ʻoihana optical.
| Mea | Palena |
| Ka Mana Ana | ʻO ke ʻano o ka ʻili 3D, ka ʻoʻoleʻa o ka ʻili, ke kiʻekiʻe o ke ʻanuʻu a me ka mānoanoa o ke kiʻiʻoniʻoni o nā mea noʻonoʻo a me nā ʻāpana optical |
| ʻAno Loaʻa ʻIkepili | ʻO ka Interferometry Scanning Vertical (VSI) + Phase-Shifting Interferometry (PSI) |
| ʻŌnaehana Hoʻoponopono | Maʻamau hiki ke hahai ʻia ʻo NIST + algorithm calibration akomi |
| Pae Ana Kū pololei | 500 μm |
| Kahua o ka ʻIke | 20× pahuhopu: 0.87 × 0.65 mm |
| Hana Kāmela | Hoʻonā Kiʻekiʻe Loa: 2048 × 2448; Ka helu o ke kiʻi: 74 Fps; Hohonu Bit: 12 bit |
| Ka wikiwiki o ka nānā ʻana | 100 μm/s (ʻAno Pololei) |
| Nā Koho Lens Pahuhopu | Nā pahuhopu hoʻonui 20x / 50x hiki ke hoʻonohonoho ʻia |
| Hoʻolālā Hoʻokomo | Kahua hoʻokaʻawale haʻalulu hana i kūkulu ʻia, loaʻa ke kau ʻana ma ke ʻano ākea a me ke kū pololei |
| Ana holoʻokoʻa (L × W × H) | 120 × 80 × 65 kenimika |
| Kaumaha ʻupena | ≤58 kg |
3. Hoʻolālā ʻAha Kuhina Hoʻohui ʻOihana, Kūlike me ka Lab & Production Line
I hoʻonohonoho pono ʻia no nā hale hana hana nui a me nā keʻena noiʻi ʻepekema me ka hoʻonohonoho kūpono.
Kahua hoʻokaʻawale haʻalulu hana i kūkulu ʻia: Ana paʻa ma lalo o ka haʻalulu hale hana, ʻaʻohe pono o ka papa hoʻokaʻawale haʻalulu keu.
ʻAno hoʻonohonoho pālua: Hoʻonohonoho ʻana ma ke ʻano ākea a kū pololei paha, hoʻohui maʻalahi me nā laina hana hana aunoa a me nā wahi hana lab.
Kino liʻiliʻi a pau-i-hoʻokahi: Kapuahi liʻiliʻi me ka nui 120 × 80 × 65 kenimika, kaumaha ≤58 kg, hoʻonohonoho maʻalahi ma kahi.
Hoʻohui ka ʻōnaehana piha i ke kumu kukui, ka ʻāpana nui interferometer a me ka module mana. Hoʻopili a pāʻani ma hope o ka wehe ʻana, ʻaʻohe pono o ka hoʻoponopono ala optical paʻakikī.
Ka Uhi Noi Laulā no ka Hana Hana Kiʻekiʻe
ʻOihana Semiconductor: ʻIke ʻia ke kiʻekiʻe o ke ʻano 3D a me ke kiʻekiʻe o nā ʻanuʻu o nā wafers silicon a me nā ʻāpana micro-nano.
ʻO nā Optics Precision: Ka hoʻāʻo ʻana i ka ʻoʻoleʻa a me ka mānoanoa o ke kiʻiʻoniʻoni no nā aniani optical, nā pahuhopu a me nā mea optical i uhi ʻia.
Nā Uhi Hana Hou: Ka nānā ʻana i ka ʻili a me ka mānoanoa o nā uhi ʻālohilohi a me nā ʻiliʻili lahilahi hana.
Nā Keʻena Hoʻokolohua Noiʻi ʻEpekema: ʻAno ʻano o ka ʻano micro-nano a me ka hoʻāʻo ʻana i ke ʻano o nā ʻāpana kikoʻī.
Me nā makahiki o ka ʻike loea i ka R&D optical, hoʻomohala kūʻokoʻa ʻo Wavelength OE i nā ala optical koʻikoʻi a me nā algorithms ana no nā interferometers kukui keʻokeʻo. Ka mana loea piha mai nā kumu kukui, nā aniani pahuhopu a hiki i nā ʻōnaehana calibration. Hana ʻia kēlā me kēia ʻāpana i ka calibration pololei multi-round ma mua o ka lawe ʻana. Hāʻawi mākou i ke kākoʻo loea piha ma hope o ke kūʻai aku a hoʻopilikino i nā hoʻonā ana kūʻokoʻa e pili ana i ka nui o ka workpiece mea kūʻai aku a me nā koi laina hana aunoa.
Ka manawa hoʻouna: Iulai-15-2026